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E-mail
762953489@qq.com
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Phone
15384324624
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Address
1712S79 Huarong Building, 178 Mintian Road, Fu'an Community, Futian Street, Futian District, Shenzhen
Shenzhen Shenguangda Technology Co., Ltd
762953489@qq.com
15384324624
1712S79 Huarong Building, 178 Mintian Road, Fu'an Community, Futian Street, Futian District, Shenzhen
Product Introduction:VPS-RF05 is a small desktop vacuum plasma processing instrument. Its principle is to apply an electric field to a gas in a vacuum state (about 10-100 Pa), and the gas will transform from a gaseous state to a plasma state (also known as the "fourth state" of matter) under the energy provided by the electric field. It contains a large number of active particles such as electrons, ions, photons, and various free radicals, which are more diverse and active than the active particles produced by typical chemical reactions, and are more likely to react with the surface of the material in contact. By utilizing these high-energy particles and active particles to undergo physical or chemical reactions with the material surface, the goal of changing the surface properties of the material can be achieved.
VPS-RF05 Small Desktop Vacuum Plasma Processing InstrumentFeatures:Imported plasma power circuit technology and discharge structure to ensure uniform distribution of plasma
VPS-RF05 Small Desktop Vacuum Plasma Processing InstrumentApplication:Remove surface organic matter, improve adhesion, enhance surface wettability, improve biocompatibility, increase surface energy, and improve surface roughness

Product Parameters:
model |
VPS-RF05 |
frequency |
13.56MHzAutomatic impedance matching |
power |
0-200Wcontinuously adjustable |
Material of the cavity |
Import grade316Lstainless steel |
Chamber volume |
5L |
Cavity Size |
Φ150(Diameter)×280(D) |
Effective processing area |
140(W)*250(D)mm |
Gas flow controller |
MFCMass flow controller |
Number of gas paths |
2 Road gas, commonly usedO2TheAr2TheN2,H2, etc. (customized for corrosive gases) |
Vacuum measurement system |
Pirani vacuum silicon tube |
ultimate vacuum |
1Pa |
Control method |
4.3Inch touch screen+PLC |
vacuum pump |
oil pump/Dry pump (optional) |
power supply |
AC220V/50Hz |
Overall dimensions |
550mm(L)×450mm(W) ×500 mm(H) |