High cleanliness quartz plasma cleaning machine material surface cleaning

NegotiableUpdate on 02/22

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Nature of the Manufacturer: Producers

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Overview

VPS-QZ05 quartz vacuum plasma processor is a small desktop plasma cleaning machine specially developed for laboratory needs. The processing chamber is made of cylindrical quartz glass, and the processor is a capacitive coupled external electrode type with no electrodes inside.

Product Details

Product Introduction

VPS-QZ05 Quartz Vacuum Plasma Processing InstrumentIt is a small desktop plasma cleaning machine specially developed for laboratory needs. The processing chamber is made of cylindrical quartz glass, and the processor is a capacitive coupled external electrode type with no electrodes inside. The discharge energy is applied from the outside of the processor, which can avoid the problems of electrode corrosion and reactant deposition on the electrode plate.

VPS-QZ05 Quartz Vacuum Plasma Processing InstrumentApplication:PDMS bonding, introduction of specific functional groups, plasma ashing, surface hydrophilic and hydrophobic modification, and improvement of adhesion

VPS-QZ05 Quartz Vacuum Plasma Processing Instrumentfeature：No pollutants will be introduced during the processing, the operation is simple, and it is suitable for use in research institutes, universities, and R&D centers

VPS-QZ05石英真空等离子处理仪

Product Parameters

model	VPS-QZ05
frequency	13. 56 MHz
power	0-200W continuously adjustable
Material of the cavity	High quality quartz
Chamber volume	5L
Cavity Size	Φ150×290（D）mm
Gas flow controller	MFC Mass Flow Controller
Number of gas paths	2-channel gas, commonly used O2, Ar2, N2, H2, etc. (corrosive gases need to be customized)
Vacuum measurement system	Pirani vacuum silicon tube
ultimate vacuum	1Pa
Control method	PLC+4.3-inch touch screen
vacuum pump	Oil pump/dry pump (optional)
power supply	AC220V/50Hz
Overall dimensions	550mm(L)×450mm(W) ×500 mm(H)