Which is good for selling ultra-high vacuum valves

Swiss VAT UHV series ultra-high vacuum valve

1、 Core Features of UHV Series

1. Product positioning

• type: All metal sealed Ultra High Vacuum Valve

• Applicable vacuum range：

• Standard Edition：10⁻⁹ ~ 10⁻ ¹² mbar

• custom editionUp to 10 ⁻¹³ mbar (special baking design)

• Core strengths：

• Zero leakageMetal seal leakage rate<1 × 10 ⁻¹² mbar=''>(He leak detection).

• High temperature baking resistanceThe valve body can withstand250°C~300°CBaking (Standard Version)/450°C(Customized version).

• No organic materialsAll metal structure to avoid air pollution.

2. Design

• Double sealed systemPrimary seal (metal blade)+secondary seal (elastic compensation).

• Low torque driveMagnetic coupling or bellows transmission to avoid shaft seal leakage.

• Material purity316L stainless steel (EP grade electrolytic polishing), surface roughness<0.8 μ m. <>

2、 Model classification and technical parameters

1. Model Naming Rules (Taking VAT UHV 24 as an Example)

2. Comparison table of sub models

3. Detailed technical parameters

3、 Typical application scenarios

1. Semiconductor manufacturing

• application：

• Chamber isolation of etching machine/ion implantation machine (to prevent particle contamination).

• Ultra high vacuum maintenance in molecular beam epitaxy (MBE) systems.

• Model recommendation：

• VAT UHV 24-A (DN40, pneumatic quick isolation).

2. Research facilities

• application：

• Beam line control of synchrotron radiation source.

• Vacuum segmentation of nuclear fusion devices (such as Tokamaks).

• Model recommendation：

• VAT UHV 54-M (DN100, manual reliable seal).

3. Aerospace and Coating

• application：

• Vacuum sealing test of satellite propellant storage tanks.

• Pressure regulation of the cavity of the optical coating machine.

• Model recommendation：

• VAT UHV 10-E (DN16, electric precision control).

4、 Selection and installation points

1. Key factors for selection

• Path requirementsCalculated based on flow rate (e.g. DN40 corresponds to approximately 20 L/s @ 10 ⁻⁶ mbar).

• Drive Type：

• pneumaticQuick switch (suitable for safety isolation).

• electricCan integrate automation control (such as PLC).

• Flange Standard：

• CF flangeUltra high vacuum (metal seal).

• ICF flangeMinimum leakage rate requirement (such as 10 ⁻¹³ mbar).

2. Installation specifications

• Cleaning requirements：

• Clean the flange surface with acetone/alcohol before installation (wear dust-free gloves).

• torque control：

• CF flange bolts need to be tightened diagonally in steps (recommended for DN40, 8-10 Nm).

• Baking suggestions：

• Heat up to 250 ° C at a rate of 10 ° C/min and hold for 48 hours.

5、 Maintenance and troubleshooting