1. It is a new depth and height measuring machine that combines slit image observation with light cutting and AF (autofocus) tracking with point light images. 2. By continuously tracking the AF drive, high-precision repeated measurements can be achieved, with good operability and fast speed. 3. Due to the method of measuring while observing the step shape mapped by the slit image, the height on the measurement screen can be recognized in real time, making it easy to determine the area to be measured. 4. A measurement system where the center of the slit image, point light image, and electron line reference line at the measurement point are all consistent can prevent measurement with incorrect values by checking for deviations. 5. In addition to the standard 90 °, the elevation angle for light cutting can also be selected to import 30 °, 60 °, and 120 ° according to the purpose.
Main specifications
Inspection method
Light cutting method (using a slit optical system to measure depth and height)
■ Objective lens
Fixed magnification of 10 times (5 times, 20 times)
Axis rotation mode
AF continuous tracking method based on point light (can be manually measured offline)
Projection gap
10um semi reflective mirror type
Z-axis measurement
Z-axis digital linear instrument 0.1 reading
repeatability accuracy
~Within 1 micrometer
Using a light source
Semiconductor laser (Class 2), halogen light source
Automatically capture changes in fine slit light, red laser spots, and step differences that represent cross-sectional shapes, Z
The axis function quickly follows and displays numerical values for measurement (automatic focusing) and system functions
Combined with the baseline of electronic wire method, the measurement range has been expanded and the utilization value has been improved
A new type of depth and height measuring machine.